Abstract
Mo ions extracted from a metal vapor vacuum arc ion source were implanted into H13 steel with a high implantation dose of 5 × 1017 cm−2 and a pulsed ion beam flux of about 300 μA cm−2. An optical interference microscopy and pin on disc apparatus investigated the wear and friction characteristics of the steel. The Mo concentration depth profile was measured by using Rutherford backscattering spectroscopy. It was observed by X-ray photoelectron spectroscopy and grazing angle X-ray diffraction that carbide of Mo appeared in the doped region. The concentration depth profile and microstructure analysis could serve to illuminate the wear resistance improvement mechanisms of the Mo implanted steel.
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