Abstract

Summary form only given. Macro-molecular layer binding on the surface of inorganic materials is an important method that can utilize synthetically the advantages of inorganic material and organic material. Plasma polymerization becomes one of the important means to realize this process because of a series of merits. In this paper, the 1-propanol (CH/sub 3/CH/sub 2/CH/sub 2/OH) and the allyl alcohol (CH/sub 2/=CHCH/sub 2/OH) were polymerized on Si substrate using radio-frequency discharge plasma polymerization The influence of polymerization parameters (plasma, flow, bias voltage) to polymerization process, film structure and characteristics were studied. The measurement result of FTIR (Fourier transform infrared spectroscopy), XPS (X-ray photon spectroscopy) and XRD (X-ray diffraction) suggested that the polymerization parameter could affect the film structure greatly, which was all amorphous organic macromolecule structure. AFM analysis showed that the film surface was very smooth. The average roughness of film polymerized with 1-propanol was 1.80 nm, and polymerized with allyl alcohol was 1.94 nm. The contacting angle of the films was measured by sessile drop process using four kinds of liquids and the surface energy of the films was calculated using contacting angle. The affect of plasma polymerization parameters to surface energy was studied. It was showed that plasma power could change the contacting angle. as well as surface energy and the interface energy of films in a small extent. The surface energy and interface energy of the samples polymerized with 1-propanol didn't change very much when the working pressure (flow) increased a lot. But for the samples polymerized with allyl alcohol, the surface energy increased obviously, with the increase of working pressure. It indicated that bias voltage had certain influence on surface energy and interface energy for the two groups of samples. The whole research indicated that the species of organic monomer and the plasma polymerization parameters had great influence on the structure and performance of the films.

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