The application of RHEED intensity effects to interrupted growth and interface formation during MBE growth of GaAs/(Al, Ga)As structures

Abstract

There is a diffraction-induced phase effect in the RHEED intensity oscillation technique used in MBE, whereby intensity maxima only correspond to monolayer completion for very restricted conditions. In particular, the angle of incidence of the primary beam is extremely critical. The effect occurs because the total intensity at the measured position of the specular beam is always derived from at least two different diffraction processes, which do not have the same phase relation to monolayer formation. It can be accomodated either by a systematic series of measurements to establish an empirical relationship between incidence angle and phase, or by Fourier transform techniques. Unless full account is taken of this purely diffraction-induced effect, very misleading results can be obtained for the time constants of the recovery period following cessation of growth and this is illustrated for GaAs. The effect also has important implications for the growth-interrupt technique. In addition, it is shown that for heterojunction formation in the GaAs/(Al, Ga)As system, adatom (Ga and Al) migration lengths are of greater importance than the position in the monolayer at which the composition is changed, and that RHEED can provide only limited information on the interface structure.