Abstract

The RHEED intensity oscillation technique has received wide-spread attention for the study of MBE growth dynamics, but insufficient consideration has been given to the diffraction conditions and processes involved. We report here a systematic investigation of the intensity oscillation behaviour as a function of diffraction parameters (azimuth, incidence angle, specular and non-specular beams), with constant growth conditions for GaAs films on GaAs (001) substrates.

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