Abstract
Laser process technologies have been developed which are well suited to the manufacture of thin-film electronic packages. The authors discuss three technologies-laser ablation, laser-assisted metal etching, and laser chemical vapor deposition-and how they may be used in polymer and metal patterning. The history of the technologies, process and tooling considerations, and specific applications are presented.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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More From: IEEE Transactions on Components, Hybrids, and Manufacturing Technology
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