Abstract
Carbon protective layers for metal evaporated (ME) tapes were prepared using electron cyclotron resonance chemical vapor deposition (ECR-CVD). Raman spectroscopy was used to evaluate the carbon protective layers. It was found that the quantity of luminescent substances in the carbon film affected the overall durability of the protective layer. Raman spectroscopy was very useful in this analysis. Our results imply that not only hardness but also flexibility is required for the application of carbon films. The quantity of luminescent substances in the films was measured using a new parameter I b/I p, obtained from the Raman spectra. Protective layers with a particular range of I b/I p were found to be optimum durability. It is significant for the investigation of carbon protective layers that their durability can be easily determined by Raman spectroscopy.
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