Abstract

This paper focused on AT-cut disc-typed quartz crystal resonator, which is one of commonly used sensitive components of quartz resonator sensor. The harmonic analysis and modal analysis of the typical AT-cut quartz crystals were performed by using the finite element method. The result shows that the harmonic frequency is close to the theoretical value. Based on the analysis of harmonic frequency, the paper has obtained the clear thickness-shear mode vibration and amplitude-frequency curve of quartz crystals. It provides a foundation for the research of quartz resonator sensor.

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