Abstract
NF3 is commonly used as an etching and cleaning gas in semiconductor industry, however it is a strongly greenhouse gas. Therefore, the destruction of disposal NF3 is an urgent task to migrate the greenhouse effect. Among the technologies for NF3 abatement, the destructive sorption of NF3 over metal oxides sorbents is an effective way. Thus, the search for a highly reactive and utilized sorbent for NF3 destruction is in great demand. In this work, AlOOH supported on carbon-sphere (AlOOH/CS) as precursors were synthesized hydrothermally and heat-treated to prepare the Al2O3 sorbents. The influence of AlOOH/CS hydrothermal temperatures on the reactivity of derived Al2O3 sorbents for NF3 destruction was investigated, and it is shown that the Al2O3 from AlOOH/CS hydro-thermalized at 120 °C is superior to others. Subsequently, the optimized Al2O3 was covered by Mn(OH)x to prepare Mn/Al2O3 sorbents via changing hydrothermal temperatures and Mn loadings. The results show that the Mn/Al2O3 sorbents are more utilized than bare Al2O3 in NF3 destructive sorption due to the promotional effect of Mn2O3 as surface layer on the fluorination of Al2O3 as substrate, especially the optimal 5%Mn/Al2O3(160 °C) exhibits a utilization percentage as high as 90.4%, and remarkably exceeds all the sorbents reported so far. These findings are beneficial to develop more efficient sorbents for the destruction of NF3.
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