Abstract
In this study, the Destruction or Removal Efficiency (DRE) of 10 types of F-gases used in the semiconductor and display industries in South Korea was measured. These industries use a large volume of F-gases with high Global Warming Potential (GWP), significantly contributing to national greenhouse gas emissions. Therefore, accurately calculating the greenhouse gas emissions from these industries and establishing appropriate mitigation plans is crucial. The current IPCC guidelines provide parameters for estimating greenhouse gas emissions for each gas, including DRE values. However, they present only a single coefficient for each gas, without considering the diverse abatement technologies that are commercially applied in practice. As a result, there is a potential for overestimating South Korea’s national greenhouse gas emissions, as these guidelines do not reflect the advanced abatement technologies used in each country’s semiconductor and display industries. To address this, the DREs of Combustion-type and Plasma-type abatement technologies, which are widely used in South Korea, were measured based on the Korean KS guidelines, developed from the U.S. EPA’s reduction efficiency measurement guidelines. The results showed that Plasma-type technologies, which are generally known to have better reduction efficiency, achieved higher DRE values compared with Combustion-type technologies. Furthermore, statistical analysis was conducted using SPSS 26 to assess whether it is significant to develop separate DRE values for different technologies. The analysis confirmed that developing distinct DREs for each technology is statistically significant. The findings of this study provide practical guidance for selecting optimal abatement technologies in South Korea’s semiconductor and display industries and serve as fundamental data for contributing to the achievement of sustainable carbon neutrality goals through more accurate greenhouse gas inventories in countries involved in semiconductor and display production.
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