Abstract
A series of FeCoTiO thin films were deposited on Si (100) substrates using oblique sputtering and stripe patterning at the same time and the static and high frequency magnetic properties were studied in details. For the single-layered films, if the anisotropy fields induced by the two methods are in the same direction, the effective anisotropy field will be greatly enhanced, closed to 300 Oe. But if the two anisotropy fields are perpendicular to each other, there will be an opposite result. In the FM/NM/FM sandwich structures, the influence of shape anisotropy will be suppressed by the exchange coupling effect between the two FM layers. The resonance frequency and permeability are still above 3.5 GHz and 75 even the width of stripes change from 40 µm to 10 µm.
Highlights
Soft magnetic thin films are being widely used for electromagnetic devices as high frequency components.[1,2] With the increasing of operational frequency and degree of integration, the requirements to materials become increasingly high and a great deal of research effort about the soft magnetic thin films has been devoted to solve this problem.[3,4,5,6] The high frequency properties of soft magnetic thin films are determined by the in-plane anisotropy field
A series of FeCoTiO thin films were deposited on Si (100) substrates using oblique sputtering and stripe patterning at the same time and the static and high frequency magnetic properties were studied in details
For the single-layered films, if the anisotropy fields induced by the two methods are in the same direction, the effective anisotropy field will be greatly enhanced, closed to 300 Oe
Summary
Soft magnetic thin films are being widely used for electromagnetic devices as high frequency components.[1,2] With the increasing of operational frequency and degree of integration, the requirements to materials become increasingly high and a great deal of research effort about the soft magnetic thin films has been devoted to solve this problem.[3,4,5,6] The high frequency properties of soft magnetic thin films are determined by the in-plane anisotropy field. Oblique sputtering and stripe patterning are the two of the most effective method to adjust the anisotropy field, so that the ferromagnetic resonance frequency and permeability.[7,8] It will be very interesting if we use the two methods at the same time. It is important to find a preparation method of thin films which can avoid the influence of shape anisotropy causing by the demagnetizing field. Metal-insulator nanogranular films have been selected because of their excellent soft magnetic properties and high electrical resistivity. The TiO2 has been chosen as nonmagnetic material to improve the soft magnetic properties and high frequency performance.[9] Oblique sputtering and stripe patterning were both used to adjust the anisotropy field. A ferromagnetic/nonmagnetic/ferromagnetic (FM/NM/FM) sandwich structures were fabricated to reduce the influence of demagnetizing field
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