Abstract
Abstract The accuracy, precision and stability of a parallel electron-energy-loss spectrometer on a (scanning) transmission electron microscope has been assessed by the measurement of the plasmon peak energy of Al at and below room temperature. An absolute instrumental accuracy of ± 0.04eV (3[sgrave] confidence limits) was obtained with a relative accuracy of ± 0.015 eV. Hardware and software had to be developed to extend the energy resolution beyond the inherent resolution of the parallel electron-energy-loss spectrometer unit used.
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