Abstract
Understanding the formation and evolution of the texture of obliquely deposited films is of great significance for improving their performance. Among these films, Au films have many advantages and wide application prospects. However, a systematic study of texture evolution of Au films has not been reported. In this study, Au films were prepared by magnetron sputtering oblique deposition. The pole figures of films deposited with various oblique angles (γ) and thicknesses were measured by X-ray diffraction. The morphology and size of the grains on the surface and in the cross-section of the films were observed by scanning electron microscopy. The surface topography of the films was determined by atomic force microscopy. During the growth process of the films, the increase rate of roughness was faster than the transverse broadening rate of grains. The samples deposited at γ ≤ 60° were composed of densely arranged grains with inclined (111) plane fiber texture whose tilt angle increased with the increase of γ and thickness. In the films deposited at γ ≥ 70°, the grain structure evolved into highly porous nanorods, and the (111) plane texture was more slanted and dispersed. The mechanism of film texture formation during oblique deposition is discussed.
Published Version
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