Abstract
A micro-Faraday array detector (row of miniature 32 thin film strip electrodes wire bonded to an on-chip integrated capacitance transimpedance amplifier) was tested for use in a multiple collector secondary ion mass spectrometry. The detector was mounted on a standard IMS3f SIMS instrument in place of a microchannel plate. The measurements were performed by using a silicon sample bombarded by either or Cs+ primary ions with or without D2O flooding and detecting secondary ions of Si±, SiH±, O-, SiD−, OD−. A parallel detection of near masses of 29Si and 28SiH or 18O and 16OD was demonstrated at a sensitivity level ∼230 counts/s.
Published Version
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