Abstract
Recently, a method was developed for determining interface profiles of extreme-ultraviolet layered synthetic microstructures (LSMs), which is based on computer processing of digitized LSM electron micro- graphs. Nickel/carbon and molybdenum/carbon multilayers are studied and analyzed in order to show the potentialities of the method in control- ling the uniformity of the period and the thickness of the layers when LSMs are manufactured. Such a method makes it possible to get infor- mation about the quality of LSMs on a nanometer scale. © 2000 Society of Photo-Optical Instrumentation Engineers. (S0091-3286(00)02805-1) Subject terms: soft x rays; multilayers; transmission electron microscopy; image processing.
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