Abstract

A compact new test structure for direct extraction of components of the capacitance matrix for multilayer interconnections is presented. In this new method, each component is directly obtained from the measurement data without any calculation as the difference between current values for driver unit and reference unit, and the total pads are kept at 8 independently of the size of target matrix. As a result of evaluation of measurement errors due to the asymmetry of the structures, this new method can measure components of capacitance matrix with femto-farad order precision.

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