Abstract
A compact new test structure for direct extraction of components of the capacitance matrix for multilayer interconnections is presented. In this new method, each capacitive component in integrated structures is separately and directly obtained from measurement, and the total pads are kept to eight, independent of the size of the target matrix. As a result of evaluation of measurement errors caused by the asymmetry of structures, this new method can measure components of capacitance matrix with a precision of femto-farad order.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
