Abstract

We describe some simple test specimens for measuring the lattice resolution and/or the probe size of a scanning transmission electron microscope (STEM) and for testing the visibility of atoms of various atomic numbers. Using the dark field imaging method which represents the mass density of the specimen, we have found that single atoms, atom clusters, crystal and/or arrays from (1) uranyl acetate and uranyl formate (2) borotungstic acid and (3) bovine catalase were suitable for the former test specimens and single atoms and/or clusters from (1) ferritin from horse spleen, (2) zinc oxide, (3) borotungstic acid and (4) uranyl acetate and uranyl formate were good for the latter test specimens. These specimens can easily be made without any trace of hydrocarbon contamination. The combination of these specimens covers a wide range of resolution and visibility of various atoms.

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