Abstract
In the present work, VO2(B), V6O13 and α-V2O5 polycrystalline films have been successfully fabricated by DC reactive magnetron sputtering, and large-area uniform hydrogenated VO2(B) and V6O13 samples were realized by a proton-electron co-doping method. The analysis of the X-ray and Raman spectrum data revealed that hydrogenated V6O13 film undergoes a significant change of micro strain in comparison to the VO2(B) sample. Terahertz properties of VO2(B) and V6O13 samples were characterized and their complex terahertz conductance successfully simulated by the Drude-Smith model. The temperature dependence of the conductivity of hydrogenated samples at the long-wavelength limit can be described by Mott’s small polaron theorem. It also suggests that the discrepancy in the distribution of trap states induced by the proton-electron co-doping method plays a dominant role. These results have a specific significance for understanding the fundamental properties of hydrogenated oxides and their optical applications in long wavelengths.
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