Abstract
Tensor‐based process control and monitoring for semiconductor manufacturing with unstable disturbances
Published Version
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https://doi.org/10.1002/nav.22228
Copy DOIJournal: Naval Research Logistics (NRL) | Publication Date: Sep 26, 2024 |
License type: cc-by-nc-nd |
Tensor‐based process control and monitoring for semiconductor manufacturing with unstable disturbances
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