Abstract
We have performed experimental measurements to determine the temporal evolution of Langmuir sheaths near an electrode to which a negative step bias is applied in a collisionless argon plasma. The plasma was produced by a hot-filament discharge in a multidipole device. Plasma potential data were obtained using emissive probes with two different techniques: time resolved sampling and time averaged techniques. The sheath is found to initially form close to the electrode, to extend to a maximum separation, and to contract to a steady-state value. The time scale required to reach a steady state is close to the time scale of the presheath relaxation. Characteristics of sheaths in rf plasmas are also measured using a parallel-plate plasma capacitor. It is observed that the plasma potential profile has significant variation with frequency, even for frequencies as low as 1 kHz which are far below the ion plasma frequency (∼1 MHz).
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
