Abstract
Monodisperse spherical nanoporous silicon (np-Si) particles of submicrometer size are fabricated with mesoporous silica particles as a template. Silicon is synthesized within the mesopores of monodisperse silica particles by the thermal decomposition of monosilane. Then, the template material (a-SiO2) is removed by wet etching. The particles obtained have a small root-mean-square size scatter (no more than 10%) and large specific surface area (250 m2 g–1) and pore volume (0.5 cm3 g–1). It is shown that np-Si particles exhibit photoluminescence in the visible and near-IR (infrared) spectral ranges.
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