Abstract
This paper reports on the design and demonstration of a miniaturized and integrated heater that enables low power ovenization and temperature stability for piezoelectric MEMS resonators. The low power ovenization is implemented by an integrated symmetric oven platform and high thermal-resistance supporting structures. The temperature compensation circuit is formed by a modified Wheatstone bridge with an on-chip dummy resistor and a constant resistance feedback loop is used to stabilize the resonator center frequency over temperature. Through the use of the integrated heater and the simple feedback circuit, we were able to reduce the resonator's intrinsic frequency instability to 100 ppm (from over 2700 ppm) over a temperature range of -35 °C to + 85 °C. Compared with the state of the art, this paper constitutes a fundamental step forward in the demonstration of temperature stable oscillators with a focus on improving resonator temperature stability with very low power consumption. [2016-0182].
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
