Abstract
ST-cut quartz has been widely used in surface acoustic wave (SAW) devices due to its good temperature stability. However, ST-cut SAW devices are still not as temperature stable as AT-cut quartz. Hence new SAW resonators with better temperature stability are needed. We present surface acoustic wave resonators on the in-plane rotated 33° Y-cut quartz with improved temperature stability. We calculated the frequency temperature characteristics of Rayleigh waves using the finite element method under the condition of Euler angle (0, 123, 39-44). The second-order temperature coefficients of less than -1.5×10-8/°C2 were achieved by calculations and experiments. Compared with the second-order temperature coefficients of ST-cut quartz (-3.4×10-8/°C2), these values are more than 50% smaller. The fabricated SAW resonators have good crystal impedance (resonance impedance) and Q-value.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
