Abstract
Abstract— Low‐temperature deposited a‐Si:H TFTs have been successfully fabricated on colorless polyimide (CPI) substrate for flexible‐display applications. A serious degradation in threshold voltage was observed after applying external thermal stress. The threshold‐voltage shift saturates after applying several thermal stress cycles. In addition, the TFTs show instability under long periods of thermal stress with fixed temperature. This phenomenon was composed of thermally induced traps and substrate‐expansion‐induced mechanical stress. Finally, the a‐Si:H TFT backplane fabricated on a PI substrate at low temperature has been successfully demonstrated for flexible AMLCDs.
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