Temperature fluctuations during the deposition of InSb films

Abstract

High-quality InSb films must be grown through the melting-solidification process. A fluctuation of the film temperature, especially in the early stages of the evaporation process gives rise to this melting-solidification process. The shape of the temperature fluctuation curves can be explained by the variation of deposition rate during the evaporation process. It was found that the fluctuation of the film temperature was closely related to the maximum value of the deposition rate. The optimum fluctuation curve of film temperature was established by selecting a suitable value of the maximum deposition rate. The maximum deposition rate of around 50 Hz/s gives the optimum fluctuation curve, which causes a large area of black spots. The effectiveness of the sensing position of the substrate temperature on the fluctuation of film temperature is also investigated.