Abstract
Pyrolytically deposited transparent conducting zinc oxide thin films on glass substrates were successively subjected to a post-deposition heat treatment in air and in vacuum. The effects of heat treatment on the electrical transport properties were studied in detail. The films were polycrystalline in structure and the oxygen chemisorption-desorption process was found to play an important role in controlling the electronic properties. Various grain-boundary and energy-band parameters were calculated by taking conventional extrinsic semiconductor theory and grain-boundary trapping models into account. The samples were non-degenerative at room temperature and Hall mobility was found to be modulated by the grain-boundary potential barrier height via sample temperature.
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