Abstract
Abstract Pyrolytically deposited transparent conducting zinc oxide thin films on glass substrates have been subjected to successive post-deposition heat treatments in air and in vacuum. The effects of heat treatment on the electrical transport properties have been studied in detail. The films were polycrystalline, and oxygen chemisorption-desorption processes were found to play an important role for controlling the electronic properties. Various grain boundary and energy band parameters have been calculated by taking conventional extrinsic semiconductor theory and grain boundary trapping models into account. The samples were nondegenerate at room temperature, and the Hall mobility was found to be modulated by the grain boundary potential barrier height via the sample temperature.
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