Abstract

In this study, the effect of growth temperature on the structural properties of Au-catalysed epitaxial GaAs semiconductor nanopillars grown by metal-organic chemical vapour deposition is investigated by electron microscopy. It has been found that the growth temperature plays a significant role on the evolution of side-facets of zinc-blende structured GaAs nanopillars. At a growth temperature of 550 °C, six side-facets are formed; whereas at a higher growth temperature of 600 °C, six side-facets are observed. It is believed that the formation of side-facets is a kinetically dominated process while the formation of side-facets is a thermodynamical process. Besides, the diffusion-induced nanopillar foundations present the same edge side-facets regardless of the growth temperature.

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