Abstract
Load-depth curves of an unpoled Lead Zirconate Titanate (PZT) film composite as a function of temperature were measured by nanoindentation technique. Its reduce modulus and hardness were calculated by the typical Oliver-Pharr method. Then the true modulus and hardness of the PZT film were assessed by decoupling the influence of substrate using methods proposed by Zhou et al. and Korsunsky et al., respectively. Results show that the indentation depth and modulus increase, but the hardness decreases at elevated temperature. The increasing of indentation depth and the decreasing of hardness are thought to be caused by the decreasing of the critical stress needed to excite dislocation initiation at high temperature. The increasing of true modulus is attributed to the reducing of recoverable indentation depth induced by back-switched domains. The influence of residual stress on the indentation behavior of PZT film composite was also investigated by measuring its load-depth curves with pre-load strains.
Highlights
Lead titanate zirconate (PZT) films have been integrated in microelectromechanical systems (MEMS) working as sensors, transducers and actuators et al due to their extraordinary electromechanical coupling property [1,2,3]
Because PZT films were usually experienced to concentrated electric field during working, their polarization response at nanoscale has got extensive researches by using Piezoelectric Force Microscopy (PFM) [4]
It can be seen that the maximum indentation depth increases gradually from 220nm to 231nm when the temperature elevates from 24°C to 380°C
Summary
Lead titanate zirconate (PZT) films have been integrated in microelectromechanical systems (MEMS) working as sensors, transducers and actuators et al due to their extraordinary electromechanical coupling property [1,2,3]. The influence of residual stress on the indentation behavior of PZT film composite was investigated by measuring its load-depth curves with pre-load strains. The load-depth curves of the PZT film composite as a function of temperature were firstly measured.
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