Abstract

We have compared the temperature dependences of the current-voltage characteristics between single drain (SD) and lightly doped drain (LDD) poly-Si thin-film transistors (TFTs). It is found that the temperature dependence of the off-leakage current for the LDD TFT is larger because the electric field at the drain junction is weaker. Moreover, the change of the temperature dependence from low drain voltage (Vds) to high Vds for the LDD TFT is smaller because the main mechanism of the off-leakage current is always phonon-assisted tunneling (PAT), whereas that for the SD TFT shifts from PAT to band-to-band tunneling.

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