Abstract
We study the response of several microwave resonators made from superconducting NbTiN thin-film meandering nanowires with large kinetic inductance, having different circuit topology and coupling to the transmission line. Reflection measurements reveal the parameters of the circuit and analysis of their temperature dependence in the range 1.7–6 K extract the superconducting energy gap and critical temperature. The lumped-element LC resonator, valid in our frequency range of interest, allows us to predict the quasiparticle (QP) contribution to internal loss, independent of circuit topology and characteristic impedance. Our analysis shows that the internal quality factor is limited not by thermal-equilibrium QP, but an additional temperature-dependent source of internal microwave loss.
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