Abstract
The structural properties of Sn–Te–O thin films, deposited by co-evaporation of Sn and TeO 2 on monocrystalline Si substrates at room temperature are investigated by transmission electron microscopy analysis. Instead of homogeneous amorphous films, the obtained films are inhomogeneous multilayered structures, with clearly expressed polycrystalline and monocrystalline regions. Some exotic crystalline forms of Sn, Te and SnTe are detected in the layers. The composition and microstructure of the investigated films depend mainly on the Sn/Te ratio, the thickness of the layers and the substrate surface.
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