Abstract
Thin layers intended for gas sensors are prepared by vacuum co-evaporation of TeO2 and Sn. The as-deposited layers consist of a nanosized oxide matrix and finely dispersed dopants (Te, Sn, TeO2 or SnTe, depending on the atomic ratio RSn/Te). In order to improve the characteristics of the layers they are additionally doped with platinum. The gas sensing properties are strongly dependent on the atomic ratio RSn/Te, as well as on the structure, composition and surface morphology. The as-deposited layers with RSn/Te 0.8 are highly sensitive humidity sensors working at room temperature. Thermally treated Pt-doped layers with RSn/Te 2.3 are promising as ethanol sensors.With the aim of obtaining more detailed knowledge about the surface morphology, structure and composition of layers sensitive to different environments, various techniques -TEM, SAED, SEM, EDS in SEM and white light interferometry (WLI), are applied. It is shown that all layers with 1.0 > RSn/Te > 2, as-deposited and thermally treated, exhibit a columnar structure and a very smooth surface along with the nanograined matrix. The thermal treatment causes changes in the structure and composition of the layers. The ethanol-sensitive layers consist of nanosized polycrystalline phases of SnO2, Sn2O3, Sn3O4 and TeO2. This knowledge could help us understand better the behaviour and govern the characteristics of layers obtained by co-evaporation of Sn and TeO2.
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