Abstract
A selective molecular beam epitaxy (MBE) regrowth approach is presented and applied in the demonstration of complementary InP heterojunction bipolar transistor (HBT) technology for monolithic integration of NPN and PNP HBTs. State-of-art performance has been observed: The DC gain was 35 for both integrated NPN and PNP HBTs. fT of 79.6 GHz and fmax of 109 GHz were achieved for NPN devices while fT of 11.6 GHz and fmax of 22.6 GHz were achieved for PNP devices. Little performance degradation has been observed compared with same design NPN or PNP HBT layers grown on individual substrates. Monolithic microwave integrated circuits (MMICs) based on complementary InP HBT technology have been studied for the first time using this technology and their electrical characteristics are presented.
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