Abstract
Sputtered MoS2 films have exhibited good friction and wear characteristics; and to reveal the morphology and crystal structure of the rather thick films, the following methods were used.MoS2 was sputtered onto mechanically polished 1/8 in. thick 1100 aluminum blocks to a thickness of approximately 2 microns. The temperature of the blocks during sputtering was held at around 200°C by water cooling the sample holder. These conditions have yielded films of good lubrication properties. The sputtered surface was then coated with a heavy film of formvar and when dry, was scored into 1/8 in. squares and the squares floated off with a 4% solution of HgCl2 and then thoroughly washed in water. Since we wanted to examine the metal MoS2 interface, the center of the film, and the free surface; ion milling was chosen as a means of thinning to electron transmission thickness.
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