Taking into account the distribution of the noise level along the wavelength during broadband control of the deposition process of optical coatings

Abstract

The paper presents numerical results of simulations of the deposition process of a complex optical coating using broadband monitoring of this process in the case when the noise level in the measured transmittance coefficient has an uneven distribution along the wavelength. The influence on the accuracy of data control at the edges of the measured wavelength range, where the error in the transmittance coefficient is maximum, is investigated. It is shown that when a part of the data is removed at the edges of the range, the self-compensation coefficient of the deposition process errors almost does not change, while the average norm of the error vector of layer thicknesses significantly decreases. Thus, it is shown for the first time that taking into account the effect of self-compensation of errors in broadband control opens up the possibility of a reasonable choice of the optimal spectral range of optical control for practice.