Abstract
Abstract In the present article, an experimental approach to detect pollutant gases in presence of humidity was applied for gas sensors based on p-type NiO thin films. NiO thin films were deposited by radio frequency magnetron sputtering in inert atmosphere using a NiO target. Thin films were investigated by scanning electron microscopy to observe their surface morphology. Crystal structure and vibrational study were investigated by X-ray diffraction and micro-Raman spectroscopy, respectively. It was observed that deposition temperature played a crucial role in the structural and surface morphology of NiO thin films. Sensing response of the nanostructured thin films to reducing and oxidizing gas was studied as a function of gas concentration and operating temperature. A double digit (12.3) response was observed towards ozone at 200 °C, while maximum response to ethanol and acetone was recorded at 400 °C. A correlation was established between sensing response and crystalline dimension for ozone sensing. The result showed that NiO thin films can be used as p-type metal oxide material for the fabrication of solid state gas sensors to detect low concentrations of ozone (70 ppb).
Published Version
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