Abstract
The paper is dedicated to the investigation into optical properties of TiO2 thin films pulsed laser deposited at the temperature as low as 150 °C and subjected to the following heat treatment. Properties of obtained nanocrystalline films were compared to polycrystalline TiO2 films grown at elevated temperatures. The highest transmission and the best morphology in polycrystalline films have been obtained at the growth temperature of 300 °C. The two methods of post-annealing of amorphous films were employed: annealing at thermodynamically equilibrium conditions and rapid thermal annealing (RTA). RTA at 500 °C enables achievement of the best optical performance: smooth surface and high films transparency.
Published Version
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