Abstract
Tantalum–carbon micro-composite material (MCM) was produced by a process which combines plasma carburizing and heat treatment. The fabrication was performed in inductively coupled radio-frequency plasma, using CH 4–H 2–Ar mixtures, followed by a two-step heat treatment which includes solid solution and aging. The crystallography, microstructure and composition of the intermediate layers and of the MCMs were characterized by X-ray diffraction, scanning electron microscopy, energy-dispersive analysis and atomic force microscopy. The mechanical properties of the layers and of the MCMs were studied by laterally resolved depth-sensing indentation. It was found that the size and hardness within the recrystallized grains and carbon-rich grain boundaries are strongly related to the composition and thickness of the initial carburized layer. The mechanisms involved in the different process steps, in particular redistribution of Ta–C compounds and carbon diffusion towards the film bulk, are discussed.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
