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https://doi.org/10.1063/1.1524704
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Cite Journal: Review of Scientific Instruments |  Publication Date: Jan 1, 2003 |
 Citations: 3 |
Affiliation: Ruhr University Bochum
Based on silicon as semiconductor reference material, the performance of the laser modulated optical reflectance signal is analyzed with respect to variations of the technical parameters of the measuring system and with respect to variations of the charge carrier lifetime related to ion implantation.
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