Synthesized design of flexible structures for semiconductor manufacturing equipments

Abstract

In high-speed and high-precision control of a precision stage for semiconductor manufacturing, vibration of the axially moving factors leads to operational problems and limits their utility in many applications. Reaction force and vibration controls are a key to improve the control performance. In this paper, the novel design method of the precision position control system integrated with both the reaction force control and the vibration control system is proposed. The proposed method is constructed of the multi-input and multi-output (MIMO) modeling based on the subspace method and the controller design based on the position control, decoupling control and vibration control. In the design of the complex control system, the design parameters are only the identified plant model and the control bandwidth. The effectiveness of the proposed integrated design method is verified through the experiments using the developed 6-degree-of-freedom (6DOF) experimental setup.