Integrated design and control of precision XY stages with active vibration isolator

Abstract

In high-speed and high-precision control of a precision stage for semiconductor manufacturing, vibration of the axially moving factors leads to operational problems and limits their utility in many applications. Reaction force and vibration controls are a key to improve the control performance. Aiming at a systematic design of the both control systems, at first, the 6-degree of freedom equipment is developed. The precision X-Y stage is installed on the active vibrator. Two counter weights driven by a linear actuator are placed eccentric from the center of gravity, i.e., two weights are not co-axial. Next, the multi-input and multi-output (MIMO) modeling based on the subspace method is experimentally investigated. Using the identified model, the reaction force and vibration control systems as well as the positioning system are designed based on the bilateral control strategy. Finally, the effectiveness of the proposed modeling and control approach for the systematic design of the precision stage system is verified by the vibration suppression control experiments.