Abstract
In this paper, a flexible pyroelectric sensor using PbZr0·3Ti0·7O3 PZT/P(VDF-TrFE) materials on the polyimide (PI) flexible printed circuit substrate was reported. The fabrication processes, material electric properties and infrared photoelectric response property of the designed sensor were studied. First, the PZT ceramic powder was annealed at temperatures ranging from 300 to 900°C, and then 0–3 PZT/PVDF-TrFE composites films were produced by casting PZT/PVDF-TrFE suspension onto the flexible PI substrates. The highest pyroelectric coefficient obtained using 700°C annealed PZT particulates was 96 µC m−2 K−1, which was 20% higher than that of unannealed powders. The PI thermal insulation layer and thermal insulation tanks fabricated by laser microetching have been used to improve the photoelectric response ability of the infrared sensor. The specific detectivity of the sensors was calculated from the voltage responsivity and noise. Detectivity D* of the PZT/P(VDF-TrFE) infrared sensor was 1·17×108 cm Hz1/2 W−1 at 138·3 Hz modulation frequency. These results demonstrate that the pyroelectric infrared sensor possesses potential applications in flexible electronics.
Published Version
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