Synthesis of ZnO Nanostructures Using RTCVD, Suitable for Various Applications

Abstract

Zinc oxide (ZnO) nanostructures have been successfully synthesized using rapid thermal chemical vapor deposition (RTCVD) technique under ambient oxygen environment. During the growth of ZnO nanostructure, the gas pressure of oxygen was maintained at 5 Torr, and the low pressure inside the growth chamber was kept of the order of 10−6 Torr in order to increase the vapor pressure during sublimation. The morphological and application aspects of the grown ZnO nanostructures were studied at room temperature and at LN2 temperature. Different characterization techniques such as X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), energy-dispersive X-ray spectroscopy (EDAX) and UV–Vis spectroscopy have been performed for elemental analysis, crystalline nature, shape, size and band gap calculation of as-grown ZnO nanostructure. The results exhibited that grown ZnO nanostructures have various applications including solar cells and supercapacitor for energy storage devices.