Synthesis of the few layered two-dimensional molybdenum oxide atomic crystal

Abstract

We study the effect of substrate type, source temperature, and substrate position on the morphology of Alfa molybdenum oxide (α-MoO3) in physical vapour deposition. We found that the orientation and thickness of the MoO3 is strongly affected by the evaporated flow and temperature. Lying down, few layered (FL) MoO3 can be grown directly on technical substrate such as SiO2 with typical length scale of tens of micrometres. Our studies provide a simple, catalyst-free and low cost synthesis way to prepared large size FL MoO3 for further optical and electrical investigation such as photodetector, field effect transistors, and electrochromism.