Synthesis of single crystalline GaN nanoribbons on sapphire (0001) substrates

Abstract

Single crystalline GaN nanoribbons were synthesized through nitriding Ga 2O 3 thin films deposited on sapphire (0001) substrates by radio frequency magnetron sputtering. The component and structure of nanoribbons were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), energy-dispersive X-ray (EDX), transmission electron microscopy (TEM) and high-resolution transmission electron microscopy (HRTEM). The flat and smooth ribbon-like nanostructures are high quality single crystalline hexagonal wurtzite GaN. The thickness and width-to-thickness ratio of the grown GaN nanoribbons are in the range of 8–15 nm and ∼5–10, respectively.