Synthesis of silicon dioxide nanoparticles in low temperature atmospheric pressure plasma

Abstract

Results of studies carried out for the example of silicon dioxide demonstrate that nanoparticles can be successfully synthesized in low temperature atmospheric pressure plasma created with a high-frequency discharge maintained in the α mode between two plane-parallel grid electrodes. The degree of tetraethoxysilane decomposition is 80–95% and only slightly depends on the technological parameters of the process. Nanoparticles with predominantly spherical shape are synthesized in the region of the high-frequency discharge. The average diameter of the nanoparticles being formed, which falls within the range 20–60 nm, is determined by the linear velocity of the gas flow passing through the plasma region and by the reagent concentration.