Investigation of novel low temperature atmospheric pressure plasma system for deposition photo-catalytic TiO 2 thin film

Abstract

The purpose of this study was to develop a novel low-temperature atmospheric pressure (AP) plasma system and to use the system to deposit photo-catalytic titanium dioxide (TiO 2) thin film. In this study, titanium tetraisopropoxide (TTIP) was used as a precursor for TiO 2 thin film deposition. The precursor was vaporized by ultrasonic oscillator and introduced into an atmospheric plasma system by argon (Ar) carrier gas. The main plasma working gas was Ar mixed with O 2. Microstructure evolutions of TiO 2 thin film were investigated by low-angle grazing-incidence x-ray diffraction (GID), x-ray photoelectron spectroscopy (XPS), scanning electron microscope (SEM), and transmission electron microscope (TEM). The photo-catalytic properties were determined by contact angle and methylene orange de-coloration testing. In this study, the substrate temperature, the precursor flow rate and the O 2 flow rate were varied. TiO 2 thin film grown at a temperature of 350 °C, with precursor and O 2 flow rates of 20 sccm and 200 sccm, respectively, revealed the optimum photo-catalytic properties. It was also found that titanium dioxide thin films synthesized by the AP plasma method possess reasonable photo-catalytic characteristics like other deposition techniques.