Abstract
It is shown that by multipulse TEA-CO2 laser irradiation of some insulator ceramic samples (TiO2, ZrO2, HfO2) in an ammonia atmosphere, surface layers are synthesized exhibiting a complicated morphology and having a complex structure containing, beside metallic nitrides, nonstoichiometric oxygen-depleted oxides, oxinitrides, etc. Such layers have a diminished sheet resistance, and display good conduction characteristics.
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