Abstract

Hexagonal boron nitride (h-BN) has attracted significant attention because of its superior properties as well as its potential as an ideal dielectric layer for graphene-based devices. The h-BN films obtained via chemical vapour deposition in earlier reports are always polycrystalline with small grains because of high nucleation density on substrates. Here we report the successful synthesis of large single-crystal h-BN grains on rational designed Cu-Ni alloy foils. It is found that the nucleation density can be greatly reduced to 60 per mm(2) by optimizing Ni ratio in substrates. The strategy enables the growth of single-crystal h-BN grains up to 7,500 μm(2), approximately two orders larger than that in previous reports. This work not only provides valuable information for understanding h-BN nucleation and growth mechanisms, but also gives an effective alternative to exfoliated h-BN as a high-quality dielectric layer for large-scale nanoelectronic applications.

Highlights

  • Hexagonal boron nitride (h-BN) has attracted significant attention because of its superior properties as well as its potential as an ideal dielectric layer for graphene-based devices

  • Many efforts have been taken on various substrates such as Ni16–21, Cu3,21–27, Pt28,29, Ru30,31 and Co32 to obtain large h-BN crystals via the chemical vapour deposition (CVD) process

  • Our results demonstrate that the CVD-grown h-BN layer with large grain can help effectively preserve the intrinsic properties of graphene, and will certainly facilitate the further application of wafer-scale electronics

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Summary

Introduction

Hexagonal boron nitride (h-BN) has attracted significant attention because of its superior properties as well as its potential as an ideal dielectric layer for graphene-based devices. The h-BN films obtained via chemical vapour deposition in earlier reports are always polycrystalline with small grains because of high nucleation density on substrates. Many efforts have been taken on various substrates such as Ni16–21, Cu3,21–27, Pt28,29, Ru30,31 and Co32 to obtain large h-BN crystals via the chemical vapour deposition (CVD) process. Those grains in h-BN films are very small (usually o50 mm2) because of high nucleation density at the early growth stages[10,11,15,16,17,19,22]. Our results demonstrate that the CVD-grown h-BN layer with large grain can help effectively preserve the intrinsic properties of graphene, and will certainly facilitate the further application of wafer-scale electronics

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